Electrical feedback detection system for multi-point probes
US7307436B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 24, 2006 |
| Grant date | Dec 11, 2007 |
| Priority date | — |
| Expiry date | Aug 24, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R1/06794
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An electrical feedback detection system for detecting electrical contact between a multi-point probe and an electrically conducting material test sample surface. The electrical feedback detection system comprises an electrical detector unit connected to a multitude of electrodes in the multi-point probe, and optionally directly to the test sample surface. The detector unit provides an electrical signal to a multi-point testing apparatus, which can be used to determine if the multi-point probe is in electrical contact with the test sample surface. The detector unit comprises an electrical generator means for generating an electrical signal that is driven through a first multitude of electrodes of the multi-point probe, and a second multitude of switched impedance detection elements. The electrical potential across the impedance detection elements determines the electrical contact to the test sample surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.