Photomask container
US7309460B2 · kind B2 · utility
1Cited by
19References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 23, 2005 |
| Grant date | Dec 18, 2007 |
| Priority date | — |
| Expiry date | Nov 23, 2025 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67396
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A container suitable for storing and transporting photomasks and including a container body, a cover, first and second cushions and left and right channels disposed in slots formed in the container body. In one embodiment, the container of this invention is formed in a one-piece design by rotomolding. The cover is subsequently separated from the body and machined so as to provide a slidingly sufficient seal and disposed therein.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.