Method of forming a metal trace with reduced RF impedance resulting from the skin effect
US7309639B1 · kind B1 · utility
2Cited by
32References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 8, 2004 |
| Grant date | Dec 18, 2007 |
| Priority date | — |
| Expiry date | Apr 8, 2024 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/3011
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The RF impedance of a metal trace at gigahertz frequencies is reduced by forming the metal trace to have a base region and a number of fingers that extend away from the base region. When formed to have a number of loops, the metal trace forms an inductor with an increased Q.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.