Patent · US Expired

Method of producing a piezoelectric component

US7310861B2 · kind B2 · utility

42Cited by

10References

11Claims

0Family size

Assignee

Infineon Technologies AG · DE

Inventors

Robert Aigner · Winter Garden, US
Stephan Marksteiner · Putzbrunn, DE
Winfried Nessler · Munich, DE

Key dates

Filing date	Mar 25, 2004
Grant date	Dec 25, 2007
Priority date	—
Expiry date	Jul 3, 2024

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10T29/49128
WIPO fieldBasic communication processes
WIPO sectorElectrical engineering

Abstract

A method for producing a piezoelectric component comprising at least two stacked crystal filters comprises the steps of depositing of the layer stack above the bottom electrode and the subsequent patterning of the upper electrically conductive layer and, if appropriate, second piezoelectric layers. Thus, it is possible, in a simple manner, with a minimum of process steps, to produce a piezoelectric component comprising two stacked crystal filters which are directly connected to one another via their bottom and central electrodes. The piezoelectric component furthermore has the advantage that applications in which a high stop band attenuation is important can be realized with a relatively small number of filter stages. In this case, through the use of at least two stacked crystal filters, it is possible to achieve an excellent out-of-band rejection also for “single-ended signals”.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.