Method for manufacturing a scale, a scale manufactured according to the method and a position measuring device

US7312878B2 · kind B2 · utility

Assignee

• DR. JOHANNES HEIDENHAIN GMBH · DE

Inventors

• Peter Speckbacher · Kirchweidach, DE
• Georg Flatscher · Schneizlreuth, DE

Key dates

• Filing date: Sep 24, 2002
• Grant date: Dec 25, 2007
• Expiry date: Sep 11, 2023

Classification

• Technology area (CPC G): Physics
• CPC primary: G02B5/1861
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

In a method for producing a scale in the form of a phase grating, the scale itself, and a position measuring device including the scale, the scale includes two reflection layers located at a distance from one another on either side of a spacer layer. The production of the scale includes the following steps: provision of a first reflection layer, which is unbroken over its entire surface and fulfils the relationship A=R/η≧3, where R represents the degree of reflection and η represents the backscatter coefficient for electrons; application of the spacer layer to the first reflection layer; application of the second reflection layer to the spacer layer; and structuring of the second reflection layer by an electron beam lithography process.