Rotational rate sensor

US7313958B2 · kind B2 · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Rainer Willig · Tamm, DE
• Jochen Franz · Reutlingen, DE
• Burkhard Kuhlmann · Reutlingen, DE
• Joerg Hauer · Reutlingen, DE
• Udo-Martin Gomez · Leonberg, DE
• Dieter Maurer · Pfullingen, DE
• Christian Doering · Stuttgart, DE
• Wolfram Bauer · Lörrach, DE
• Udo Bischof · Wannweil, DE
• Reinhard Neul · Stuttgart, DE
• Johannes Classen · Reutlingen, DE
• Christoph Lang · Palo Alto, US
• Jens Frey · Echterdingen, DE

Key dates

• Filing date: Sep 25, 2002
• Grant date: Jan 1, 2008
• Expiry date: Dec 18, 2022

Classification

• Technology area (CPC G): Physics
• CPC primary: G01C19/5747
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A rotational rate sensor having a substrate and a Coriolis element is proposed, the Coriolis element being situated over a surface of a substrate; a driving arrangement being provided, by which the Coriolis element is induced to vibrations parallel to a first axis; a detection arrangement being provided, by which an excursion of the Coriolis elements is detectable on the basis of a Coriolis force in a second axis that is provided to be essentially perpendicular to the first axis; the first and second axis being parallel to the surface of the substrate; sensor elements that are designated to be at least partially movable with respect to the substrate being provided; a force-conveying arrangement being provided; the force-conveying arrangement being provided to convey a static force effect between the substrate and at least one of the sensor elements.