Probe apparatus and method for examining a sample
US7315175B2 · kind B2 · utility
23Cited by
5References
18Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jan 30, 2002 |
| Grant date | Jan 1, 2008 |
| Priority date | — |
| Expiry date | Jan 30, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/3581
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A probe for examining a sample (5), the probe including an emitter (1) for emitting radiation, a detector (1) for detecting radiation and a dielectric member (3) configured to direct radiation from the emitter (1) to the sample (5) and to direct radiation reflected by the sample (5) to the detector (1), wherein in use, the dielectric member (3) occupies at least half of the radiation path length from the emitter (1) to the sample (5) to the detector (1).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.