Laser interferometer for repeatable mounting on the wall of a vacuum chamber
US7315380B2 · kind B2 · utility
4Cited by
4References
13Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 24, 2005 |
| Grant date | Jan 1, 2008 |
| Priority date | — |
| Expiry date | Jan 6, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B2290/70
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A laser interferometer is disclosed comprising a housing capable of being substantially repeatably mounted to a wall of an environmental chamber, the housing including a laser source, a reflector attached to an object located within the environmental chamber, and a light passage provided through the wall of the environmental chamber enabling passage of a laser beam from the laser source to the reflector. At least one beam steerer may be provided for adjusting direction of passage of a laser beam through the light passage. Also disclosed is a column laser interferometer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.