Rotation rate sensor

US7316161B2 · kind B2 · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Rainer Willig · Tamm, DE
• Jochen Franz · Reutlingen, DE
• Burkhard Kuhlmann · Reutlingen, DE
• Joerg Hauer · Reutlingen, DE
• Udo-Martin Gomez · Leonberg, DE
• Dieter Maurer · Pfullingen, DE
• Christian Doering · Stuttgart, DE
• Wolfram Bauer · Lörrach, DE
• Udo Bischof · Wannweil, DE
• Reinhard Neul · Stuttgart, DE
• Johannes Classen · Reutlingen, DE
• Christoph Lang · Palo Alto, US
• Jens Frey · Echterdingen, DE

Key dates

• Filing date: Sep 25, 2002
• Grant date: Jan 8, 2008
• Expiry date: Sep 25, 2022

Classification

• Technology area (CPC G): Physics
• CPC primary: G01C19/5747
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A rotation rate sensor having a substrate and a Coriolis element is proposed, the Coriolis element being situated above a surface of a substrate; the Coriolis element being able to be induced to vibrate in parallel to a first axis (X); an excursion of the Coriolis element being detectable, based on a Coriolis force in a second axis (Y), which is provided to be essentially perpendicular to the first axis (X); the first and second axes (X, Y) being provided parallel to the surface of the substrate, wherein force-conveying means are provided, the means being provided to convey a dynamic force effect between the substrate and the Coriolis element.