High speed and repeatability serial sectioning method for 3-D reconstruction of microstructures using scanning electron microscope
US7319914B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 21, 2005 |
| Grant date | Jan 15, 2008 |
| Priority date | — |
| Expiry date | Aug 3, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2001/2873
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A high speed, high precision, high repeatability serial sectioning method for 3-D reconstruction of microstructure specimens is disclosed. The invention employs high-precision motorized metallographic polishing, viewing and computer controlled digital imaging of microstructure sections of a pre-selected pattern for 3-D microstructure reconstruction. The microstructure specimens are transferred throughout by a robotic manipulator arm, which provides greater precision and speed, and serial-sectioning process control software provides control. The 3-D reconstruction of the invention can be analyzed in real time and can be accomplished in a matter of hours.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.