Method and system for processing commonality of semiconductor devices

US7319938B2 · kind B2 · utility

Assignee

• Semmiconductor Manufacturing International (Shanghai) Corporation · CN

Inventors

• Eugene Wang · Shanghai, CN
• Jinghua Ni · Shanghai, CN

Key dates

• Filing date: Nov 22, 2005
• Grant date: Jan 15, 2008
• Expiry date: Nov 22, 2025

Classification

• Technology area (CPC G): Physics
• CPC primary: G05B15/02
• WIPO field: Control
• WIPO sector: Instruments

Abstract

A method and system for processing commonality of semiconductor devices. The method includes providing a first plurality of semiconductor devices, providing a second plurality of semiconductor devices, obtaining a first plurality of measured values corresponding to a characteristic associated with the first plurality of semiconductor devices, obtaining a second plurality of measured values corresponding to the characteristic associated with the second plurality of semiconductor devices, performing a first statistical analysis for the first plurality of measured values, determining a first statistical distribution, performing a second statistical analysis for the second plurality of measured values, and determining a second statistical distribution. Moreover, the method includes processing information associated with the first statistical distribution and the second statistical distribution, and determining an indicator. Also, the method includes processing information associated with the indicator, determining a confidence level, processing information associated with the confidence level, and determining whether the characteristic is stable.