Scanning transmission ion microscope
US7321118B2 · kind B2 · utility
23Cited by
33References
20Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jun 7, 2005 |
| Grant date | Jan 22, 2008 |
| Priority date | — |
| Expiry date | Jun 7, 2025 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2802
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Scanning Transmission Ion Microscope. The microscope includes a bright helium ion source to generate an ion beam and a focusing electrostatic optical column to focus the ion beam. A translation stage supports a sample to receive the focused ion beam and a detector responds to ions transmitted through the sample to generate a signal from which properties of the sample may be displayed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.