Piezoelectric thin film device and method for manufacturing the same
US7323805B2 · kind B2 · utility
20Cited by
6References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 27, 2005 |
| Grant date | Jan 29, 2008 |
| Priority date | — |
| Expiry date | Sep 28, 2025 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49155
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
A piezoelectric thin film device includes an amorphous metal film disposed on a substrate and a piezoelectric film disposed on the amorphous metal. One of crystal axis of the piezoelectric film is aligned in a direction perpendicular to a surface of the amorphous metal.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.