System and method for use in functional failure analysis by induced stimulus
US7323888B1 · kind B1 · utility
Inventor
Key dates
| Filing date | Oct 18, 2004 |
| Grant date | Jan 29, 2008 |
| Priority date | — |
| Expiry date | Oct 18, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/308
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A scanning/imaging system wherein an external stimulus is used for exciting a device under test (DUT). A stimulus source is included for providing a stationary stimulus with a controllable spot size to a device under test (DUT), the controllable spot size covering a portion of the DUT for excitation by the stationary stimulus. A sensor is operable for capturing at least one of a functional response signal and an optical image signal emanating from the DUT portion. A linear positioning device is operable to facilitate scanning of remaining portions of the DUT until a predetermined area thereof has been traversed. A controller is operably coupled to the linear positioning device, stimulus source and the sensor for providing the overall control thereof.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.