Scanning interferometry for thin film thickness and surface measurements
US7324210B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 27, 2004 |
| Grant date | Jan 29, 2008 |
| Priority date | — |
| Expiry date | Sep 28, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02F1/13392
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method including: providing a low coherence scanning interferometry data for at least one spatial location of a sample having multiple interfaces, wherein the data is collected using a low coherence scanning interferometer having an illumination geometry and an illumination frequency spectrum, and wherein the data comprises a low coherence scanning interferometry signal having multiple regions of fringe contrast corresponding to the multiple interfaces; and determining a distance between at least one pair of interfaces based on a distance between the corresponding regions of fringe contrast and information about the illumination geometry.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.