Sensor and sensor module
US7325457B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 26, 2006 |
| Grant date | Feb 5, 2008 |
| Priority date | — |
| Expiry date | Jul 26, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L27/007
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A sensor and sensor module with small power consumption and high reliability are disclosed. The sensor includes a capacitor having a capacitance varying with a physical quantity, a capacitance-voltage conversion circuit for converting the capacitance of the capacitor into a voltage, and a control signal generation circuit for generating a plurality of control signals. The capacitor has a frequency-capacitance characteristic with a resonant frequency. In a measurement of the physical quantity, the capacitance of the capacitor is measured with one of the control signals having a first frequency which is much higher or much lower than the resonant frequency. In a self-diagnosis of the sensor, the capacitance of the capacitor is measured with another one of the control signals having a second frequency which is equal or close to the resonant frequency.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.