Vertically adjustable chemical mechanical polishing head and method for use thereof
US7326103B2 · kind B2 · utility
10Cited by
15References
24Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 4, 2003 |
| Grant date | Feb 5, 2008 |
| Priority date | — |
| Expiry date | Dec 22, 2023 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB24B47/22
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
The invention provides a vertically adjustable chemical mechanical polishing head having a pivot mechanism and method for use thereof.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.