Light beam apparatus and method for orthogonal alignment of specimen
US7327452B2 · kind B2 · utility
14Cited by
21References
27Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 9, 2004 |
| Grant date | Feb 5, 2008 |
| Priority date | — |
| Expiry date | Sep 22, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/9501
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A system for orthogonal alignment of a specimen disclosed. The system includes a light-beam illumination source, collection optics, imaging optics, and a tiltable specimen holder. The light-beam source is activated to illuminate a spot on the specimen, and the imaging optics is used image that spot. The location of the spot on the imager is used to determine whether the specimen is orthogonal to the optical axis of the collection optics.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.