Air handling and chemical filtration system and method
US7329308B2 · kind B2 · utility
1Cited by
52References
25Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 9, 2004 |
| Grant date | Feb 12, 2008 |
| Priority date | — |
| Expiry date | Jul 9, 2024 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S438/909
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
The present invention relates to systems and methods for controlling humidity and temperature in gases or air streams used in semiconductor processing systems. These systems and methods can be used in combination with systems and methods for contaminant detection and removal.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.