Method and apparatus for fabricating or altering microstructures using local chemical alterations
US7329361B2 · kind B2 · utility
12Cited by
12References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 29, 2003 |
| Grant date | Feb 12, 2008 |
| Priority date | — |
| Expiry date | Aug 17, 2024 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/892
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A method and apparatus for fabricating or altering a microstructure use means for heating to facilitate a local chemical reaction that forms or alters the submicrostructure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.