Integrated visual imaging and electronic sensing inspection systems
US7330583B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 19, 2002 |
| Grant date | Feb 12, 2008 |
| Priority date | — |
| Expiry date | May 24, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02F1/136254
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Integrated inspection and test systems for liquid crystal display (LCD) active plates. The integrated inspection and test systems may combine visual imaging inspection and an electronic sensing such as voltage imaging, electron beam sensing or charge sensing, in which the potential defect information obtained by the visual inspection system is combined with the potential defect information obtained by the electronic sensing system to produce a defect report. One or more high-resolution visual cameras are scanned over a stationary plate, and the image data from the camera(s) is processed to detect potential defects. A high-resolution electronic sensing system examines the stationary plate, and the image data from the sensor(s) is processed to detect potential defects. The potential defects from the visual image data and electronic sensing image data are processed to produce the final defect information.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.