Tilt-insensitive flow sensor
US7331224B2 · kind B2 · utility
4Cited by
15References
25Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 7, 2004 |
| Grant date | Feb 19, 2008 |
| Priority date | — |
| Expiry date | Jun 22, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01F1/692
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A flow sensor is provided having a substrate with a sensing element and flow channel over the sensing element. The sensing element senses at least one property of a fluid. The flow channel is configured such that tilting the flow sensor does not have a significant effect on the measured signal. A device for measuring tilt in a system having a fluid flow path is also provided.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.