Modular substrate gas panel having manifold connections in a common plane
US7334605B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Aug 26, 2003 |
| Grant date | Feb 26, 2008 |
| Priority date | — |
| Expiry date | Apr 29, 2024 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/87885
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
A gas panel comprising a first gas stick, a second gas stick, and a first manifold. The first gas stick has a first flow path that includes a first plurality of ports formed in a common plane, and the second gas stick has a second flow path that includes a second plurality of ports formed in the common plane. The first manifold has first and second ports formed in the common plane, the first port being fluidly connected to one port of the first plurality of ports of the first gas stick, and the second port being fluidly connected to one port of the second plurality of ports of the second gas stick. A thermally and vibrationally insulating mounting assembly may be used to mount the first and second gas sticks to a mounting plate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.