Patent · US Active

High current density particle beam system

US7335894B2 · kind B2 · utility

26Cited by

5References

27Claims

0Family size

Assignee

ICT Integrated Circuit Testing Gesellschaft · DE

Inventors

Juergen Frosien · Ottobrunn, DE
Stefan Lanio · Erding, DE
Gerald Schoenecker · Munich, DE
Alan D. Brodie · Palo Alto, US
David A. Crewe · Long Grove, US

Key dates

Filing date	Nov 15, 2005
Grant date	Feb 26, 2008
Priority date	—
Expiry date	Jul 27, 2026

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/24485
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

The present invention relates to a charged particle unit for deflecting and energy-selecting charged particles of a charged particle beam. Thereby, a double-focusing sector unit for deflecting and focusing the charged particle beam and an energy-filter forming a potential is provided, whereby charged particles of the charged particles beam are redirected at the potential-saddle depending on the energy of the charged articles.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.