Alan D. Brodie
35Patents
8h-index
92Co-inventors
78Inventor score
Filing activity: Mar 17, 1994 → Sep 7, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5578821A | Electron beam inspection system and method | Electricity | 268 | Expired |
| US5502306A | Electron beam inspection system and method | Electricity | 259 | Expired |
| US6844550B1 | Multi-beam multi-column electron beam inspection system | Electricity | 116 | Expired |
| US5717204A | Inspecting optical masks with electron beam microscopy | Electricity | 95 | Expired |
| US5665968A | Inspecting optical masks with electron beam microscopy | Electricity | 72 | Expired |
| US6617587B2 | Electron optics for multi-beam electron beam lithography tool | Electricity | 68 | Expired |
| US6977375B2 | Multi-beam multi-column electron beam inspection system | Electricity | 33 | Expired |
| US7335894B2 | High current density particle beam system | Electricity | 26 | Active |
| US8253119B1 | Well-based dynamic pattern generator | Electricity | 6 | Active |
| US7091486B1 | Method and apparatus for beam current fluctuation correction | Electricity | 6 | Expired |
| US6316164A | Proximity effect correction method through uniform removal of fraction of interior pixels | Emerging Cross-Sectional Technologies | 4 | Expired |
| US8063365B1 | Non-shot-noise-limited source for electron beam lithography or inspection | Electricity | 4 | Active |
| US10338013B1 | Position feedback for multi-beam particle detector | Electricity | 4 | Active |
| US7828622B1 | Sharpening metal carbide emitters | Electricity | 3 | Active |
| US7855362B1 | Contamination pinning for auger analysis | Physics | 2 | Active |
| US9214344B1 | Pillar-supported array of micro electron lenses | Emerging Cross-Sectional Technologies | 2 | Active |
| US10242839B2 | Reduced Coulomb interactions in a multi-beam column | Electricity | 2 | Active |
| US10497536B2 | Apparatus and method for correcting arrayed astigmatism in a multi-column scanning electron microscopy system | Electricity | 2 | Active |
| US7615747B1 | Sampling feedback system | Electricity | 2 | Active |
| US9874597B2 | Light-emitting device test systems | Physics | 1 | Active |
| US8642981B1 | Electron microscope assembly for viewing the wafer plane image of an electron beam lithography tool | Electricity | 1 | Active |
| US9040942B1 | Electron beam lithography with linear column array and rotary stage | Electricity | 1 | Active |
| US9824851B2 | Charge drain coating for electron-optical MEMS | Electricity | 1 | Active |
| US12264554B2 | Valve arrangement | Mechanical Engineering; Lighting; Heating | 0 | Active |
| US11239048B2 | Arrayed column detector | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.