Hydrocarbon dielectric heat transfer fluids for microwave plasma generators
US7338575B2 · kind B2 · utility
3Cited by
13References
9Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 10, 2004 |
| Grant date | Mar 4, 2008 |
| Priority date | — |
| Expiry date | May 14, 2025 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05H1/46
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A process and apparatus for cooling a plasma tube generally includes flowing a hydrocarbon dielectric heat transfer fluid into a space defined by the plasma tube and a concentric tube surrounding the plasma tube. In one embodiment, the hydrocarbon fluid is selected to have a dissipation factor less than 0.002 and a thermal efficiency coefficient greater than or equal to 1.30 kJ/kg*K.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.