Incorporation of a phase map into fast model-based optical proximity correction simulation kernels to account for near and mid-range flare

US7343271B2 · kind B2 · utility

Assignee

• International Business Machines Corporation · US

Inventors

• Gregg M. Gallatin · Newtown, US
• Emanuel Gofman · Haifa, IL
• Kafai Lai · Poughkeepsie, US
• Mark A. Lavin · Katonah, US
• Maharaj Mukherjee · Poughkeepsie, US
• Dov Ramm · Gdera, IL
• Alan E. Rosenbluth · Yorktown Heights, US
• Shlomo Shlafman · Haifa, IL

Key dates

• Filing date: Oct 27, 2003
• Grant date: Mar 11, 2008
• Expiry date: May 13, 2025

Classification

• Technology area (CPC G): Physics
• CPC primary: G03F7/705
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

A first method to compute a phase map within an optical proximity correction simulation kernel utilizes simulated wavefront information from randomly generated data. A second method uses measured data from optical tools. A phase map is created by analytically embedding a randomly generated two-dimensional array of complex numbers of wavefront information, and performing an inverse Fourier Transform on the resultant array. A filtering function requires the amplitude of each element of the array to be multiplied by a Gaussian function. A power law is then applied to the array. The elements of the array are shuffled, and converted from the phasor form to real/imaginary form. A two-dimensional Fast Fourier Transform is applied. The array is then unshuffled, and converted back to phasor form.