Patent · US Expired

Pressure sensor featuring pressure loading of the fastening element

US7343806B2 · kind B2 · utility

2Cited by
3References
12Claims
0Family size

Assignee

Inventors

Key dates

Filing dateAug 18, 2003
Grant dateMar 18, 2008
Priority date
Expiry dateAug 18, 2023

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2924/10253
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A pressure sensor having a pressure sensor element, the pressure sensor element having a diaphragm area and a first fixing area, the pressure to be measured exerting a force action on the diaphragm area, the first fixing area being connected to a second fixing area of a fixing element to fix the pressure sensor element, and the first fixing area and the second fixing area being pressure-loaded by the force action.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.