Method and apparatus for blending process materials
US7344298B2 · kind B2 · utility
23Cited by
47References
23Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 18, 2003 |
| Grant date | Mar 18, 2008 |
| Priority date | — |
| Expiry date | Feb 6, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05D11/138
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A method and apparatus for blending and supplying process materials. The method and apparatus are particularly applicable to the blending of ultra-high purity chemicals, the blending of abrasive slurries with other chemicals for the polishing of semiconductor wafers, and high-accuracy blending of chemicals.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.