System and method for integrated data transfer, archiving and purging of semiconductor wafer data
US7346883B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 8, 2005 |
| Grant date | Mar 18, 2008 |
| Priority date | — |
| Expiry date | May 25, 2026 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P90/30
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A system for the integrated archiving, restoring, purging, importing and exporting of semiconductor wafer data, the system including a data acquisition system for acquiring scan data from differing types of semiconductor wafer scanning tools such as wafer dimensional tools, wafer inspection tools, and wafer nanotopography tools, a buffer system for providing temporary storage for scan data transmitted over a network from the data acquisition system and for providing fault tolerance, a server system for providing storage for the scan data transmitted from the buffer system and converting the scan data into a format used by and stored in a database management system; and an analysis system client station including a display and communicating with the server system over the network, the analysis system and the server system managing the purging, archiving, restoring, importing and exporting of scan data.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.