Method for connecting magnetic substance target to backing plate, and magnetic substance target
US7347353B2 · kind B2 · utility
14Cited by
6References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 14, 2002 |
| Grant date | Mar 25, 2008 |
| Priority date | — |
| Expiry date | Sep 23, 2024 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/12465
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A method for connecting a magnetic substance target to a backing plate with less variation in plate thickness, characterized in having the steps of connecting the magnetic substance target to an aluminum plate beforehand while maintaining the flatness, connecting the magnetic substance target connected to the aluminum plate to the backing plate while maintaining the flatness, and grinding out the aluminum plate, whereby the flatness of the magnetic substance target can be maintained until the magnetic substance target is connected to the backing plate by a relatively simple operation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.