Patent · US Active

Methods of programming silicon oxide nitride oxide semiconductor (SONOS) memory devices

US7349262B2 · kind B2 · utility

5Cited by
2References
11Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMay 12, 2006
Grant dateMar 25, 2008
Priority date
Expiry dateSep 30, 2026

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG11C16/04
  • WIPO fieldComputer technology
  • WIPO sectorElectrical engineering

Abstract

A method of programming a silicon oxide nitride oxide semiconductor (SONOS) memory device is provided. The SONOS memory device includes a substrate, first and second impurity regions spaced apart on the substrate, a gate oxide layer formed over the substrate between the first and second impurity regions, a trap layer formed over the gate oxide layer, an insulation layer formed over the trap layer, and a gate electrode formed over the insulation layer. The method of programming the SONOS device includes writing data into the SONOS memory device by applying a first voltage to the first impurity region, a gate voltage to the gate electrode, and a second voltage to the second impurity region, where the second voltage is a negative voltage.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.