Closed-loop comb drive sensor
US7350415B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | May 25, 2006 |
| Grant date | Apr 1, 2008 |
| Priority date | — |
| Expiry date | May 25, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P2015/0814
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A closed-loop, comb drive device that reduces certain “common mode” sensor errors. The device includes a comb structure, electronics, a substrate, and a position sensor. The comb structure includes two comb-drive sections, each having at least two subsections. The comb drive sub-sections in each section are positioned in a diagonal relationship to each other relative to the device axes. A separate pick-off section, along with the electronics, determine which of the two drive sections should receive a voltage differential, and the size of that differential. The diagonal relationship within each drive section eliminates many of the large scale factor errors which often occur in prior-art designs.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.