Optically enhanced probe alignment
US7355422B2 · kind B2 · utility
4Cited by
9References
23Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Mar 6, 2006 |
| Grant date | Apr 8, 2008 |
| Priority date | — |
| Expiry date | Sep 13, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R1/06794
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A novel probe card that comprises a set of fiducials and a method for using the same are disclosed. The set of fiducials comprises a first fiducial and a second fiducial fixed relative to the probe card substrate. Comparing the relative positions of the fiducials determines whether the probes are in proper alignment. This can be performed by the unaided eye or by using a low powered microscope. This novel probe card may also be used with computer vision alignment methods, thus enhancing the speed and accuracy of the computer vision method.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.