Normal incidence rotating compensator ellipsometer
US7355708B2 · kind B2 · utility
2Cited by
13References
20Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Dec 13, 2006 |
| Grant date | Apr 8, 2008 |
| Priority date | — |
| Expiry date | Dec 13, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/211
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A normal incidence rotating compensator ellipsometer includes an illumination source that produces a broadband probe beam. The probe beam is redirected by a beam splitter to be normally incident on a sample under test. Before reaching the sample, the probe beam is passed through a rotating compensator. The probe beam is reflected by the sample and passes through the rotating compensator a second time before reaching a detector. The detector converts the reflected probe beam into equivalent signals for analysis.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.