Comprehensive front end method and system for automatically generating and processing photomask orders
US7356374B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 27, 2005 |
| Grant date | Apr 8, 2008 |
| Priority date | — |
| Expiry date | Aug 30, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06Q30/0621
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The present invention relates to a comprehensive front-end method and system for automatically generating and processing photomask orders. This method and system includes two separate, but related software components. The first software component of the present invention is used to generate a photomask order in a specified format. The second software component of the present invention processes at least a portion of the photomask order (which was generated using the first software component) into a substantially ready-to-write jobdeck file and/or a substantially ready-to-write inspection file, which in turn is transferred to a remote photomask manufacturer's system to manufacture a photomask. These software components can be installed as separate programs on a computer system or operate as a single software package performing multiple functions.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.