Methods of configuring a sensor network
US7363195B2 · kind B2 · utility
8Cited by
45References
5Claims
0Family size
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Key dates
| Filing date | Jul 1, 2005 |
| Grant date | Apr 22, 2008 |
| Priority date | — |
| Expiry date | Jul 1, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05B23/0254
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
A sensor network collects time-series data from a process tool and supplies the data to an analysis system where pattern analysis techniques are used to identify structures and to monitor subsequent data based on analysis instructions or a composite model. Time-series data from multiple process runs are used to form a composite model of a data structure including variation. Comparison with the composite model gives an indication of tool health. A sensor network may have distributed memory for network configuration.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.