Sensarray Corporation
14Patents
0Active
14Granted
35Portfolio score
Filing activity: Jun 2, 1997 → Jul 1, 2005
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6190040A | Apparatus for sensing temperature on a substrate in an integrated circuit fabrication tool | Physics | 62 | Expired |
| US6616332B1 | Optical techniques for measuring parameters such as temperature across a surface | Physics | 58 | Expired |
| US6325536A | Integrated wafer temperature sensors | Physics | 50 | Expired |
| US7135852B2 | Integrated process condition sensing wafer and data analysis system | Electricity | 42 | Expired |
| US5967661A | Temperature calibration substrate | Physics | 42 | Expired |
| US5746513A | Temperature calibration substrate | Physics | 40 | Expired |
| US5929689A | Photodetector quiescent current compensation method and apparatus | Electricity | 36 | Expired |
| US7151366B2 | Integrated process condition sensing wafer and data analysis system | Electricity | 27 | Expired |
| US6889568B2 | Process condition sensing wafer and data analysis system | Electricity | 21 | Expired |
| US7149643B2 | Integrated process condition sensing wafer and data analysis system | Electricity | 10 | Expired |
| US7360463B2 | Process condition sensing wafer and data analysis system | Electricity | 9 | Expired |
| US6915589B2 | Sensor positioning systems and methods | Physics | 9 | Expired |
| US7363195B2 | Methods of configuring a sensor network | Physics | 8 | Expired |
| US7156924B2 | System and method for heating and cooling wafer at accelerated rates | Electricity | 8 | Expired |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.