Measurement device for electron microscope
US7363802B2 · kind B2 · utility
1Cited by
17References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 12, 2004 |
| Grant date | Apr 29, 2008 |
| Priority date | — |
| Expiry date | May 12, 2024 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2583
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
This invention relates to a measurement device for use in an electron microscope. The device comprises a sample holder, for holding a sample to be studied, and an indentation tip, being arranged in proximity of the sample holder, whereby an interaction between the sample and the tip is arranged to be measured. The measurement device comprises a force sensor being positioned in proximity with an interaction area of the sample and the tip and is arranged to directly measure a force resulting from interaction between the sample and the tip.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.