Method for manufacturing semiconductor device
US7365004B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Jan 12, 2005 |
| Grant date | Apr 29, 2008 |
| Priority date | — |
| Expiry date | Aug 18, 2025 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02E10/50
Abstract
The invention is aimed to prevent that fall of characteristic of a solar battery and producing yield caused by particles of powder condition generating from working part at laser beam process in the method producing the solar battery by laser beam process. The constitution of the invention is characterized by comprising: a first step forming the lower electrode and the semiconductor layer on the insulating substrate by laminating; a second step forming a protective film on surface of the semiconductor; a third step forming an opening portion at the semiconductor layer, or the semiconductor layer and the lower electrode by laser beam process after the second step; and a fourth step removing the protective film.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.