Test probe and tester, method for manufacturing the test probe
US7365561B2 · kind B2 · utility
4Cited by
9References
9Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 19, 2005 |
| Grant date | Apr 29, 2008 |
| Priority date | — |
| Expiry date | Jul 19, 2025 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49204
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A test probe having a conductive part electrically connected to terminals of a test-object device, including: a silicon substrate; a protrusion made of resin provided on the silicon substrate; a first conductive part which is provided on the protrusion and comes in contact with the terminals; and a second conductive part which is provided in a region other than a region having the protrusion on the silicon substrate and is electrically connected to the first conductive part.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.