Fast x-ray lenses and fabrication method therefor
US7365918B1 · kind B1 · utility
36Cited by
3References
27Claims
0Family size
Assignee
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Key dates
| Filing date | Aug 10, 2005 |
| Grant date | Apr 29, 2008 |
| Priority date | — |
| Expiry date | Nov 10, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B5/1876
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A fabrication process for zone plate lenses is based on controlled thin layer deposition for fabricating structures as small as 2 nanometers (nm) in width, and potentially smaller. The substrate for deposition will take the form of a precision hole, fabricated in a substrate, such as silicon by electron beam lithography and subsequent reactive ion etching. A controlled layer deposition is then used to form the required zone plate structure. A subsequent thinning process is used to section the hole and produce a zone plate with the required layer thicknesses.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.