MOPA excimer or molecular fluorine laser system with improved synchronization
US7366213B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 17, 2004 |
| Grant date | Apr 29, 2008 |
| Priority date | — |
| Expiry date | Apr 19, 2025 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S3/2308
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The relative timing delay between channels of a discharge circuit can be adjusted through application of appropriate control voltages. A control voltage of relatively long duration and relatively small voltage, with respect to a common system pulse, can be applied to any channel in order to adjust the relative timing delay. This control voltage can be, for example, a magnetization pre-pulse voltage applied to an indictor for a channel in order to adjust a hold-off time. A synchronization control unit and feedback loop can be used to monitor the timing, such that the syncronization control unit can apply a control voltage when a delay change exceeds a timing adjustment threshold value, and can apply a pre-ionization voltage when the delay change is less than the adjustment threshold value. Using both a control voltage and a pre-ionization voltage provides for both coarse and fine adjustment of the delay.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.