Substrate transfer apparatus and substrate transfer method
US7367601B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Nov 1, 2001 |
| Grant date | May 6, 2008 |
| Priority date | — |
| Expiry date | Aug 3, 2023 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/53191
- WIPO fieldHandling
- WIPO sectorMechanical engineering
Abstract
The present invention provides a substrate carrying apparatus capable of surely carrying a substrate with electronic parts mounted thereon, at low costs without causing the electronic parts to fall off the substrate, and without damaging the substrate. A substrate carrying apparatus has an arm body capable of vertical and horizontal movement. The arm body is provided with a plurality of substrate suction pads capable of sticking to the upper surface of the glass substrate by suction to hold the glass substrate, and a plurality of electronic part suction pads disposed above the electronic parts so as to correspond to the electronic parts, respectively. The electronic part suction pads are capable of sticking to the upper surfaces of the electronic parts by suction to hold the electronic parts. The suction pads are connected to a suction device by suction lines. The suction pads are combined, respectively, with position adjusting mechanisms of adjusting the respective positions of the suction pads relative to the arm body. The position adjusting mechanisms adjust the respective positions of the suction pads relative to the arm body according to the size and position of the glass subs…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.