Intermediate suction support and its utilisation for producing a thin film structure
US7368030B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 27, 2005 |
| Grant date | May 6, 2008 |
| Priority date | — |
| Expiry date | Oct 15, 2026 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T156/1944
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The present invention relates to an intermediate suction support. The support has at least one suction surface (62) intended to receive a first face of at least one substrate comprising an embrittled layer, a film thus being defined between the first face of the substrate and the embrittled layer, the suction surface (62) of the intermediate support being the face with at least one suction element (63) comprising suction means provided so that, when the embrittled layer is submitted to a treatment leading to the separation of the film from the rest of the substrate, the film can be recuperated.Application to the production of a thin film structure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.