Probe station with two platens
US7368925B2 · kind B2 · utility
13Cited by
741References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 16, 2004 |
| Grant date | May 6, 2008 |
| Priority date | — |
| Expiry date | Jan 16, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/311
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A probe station for testing a device under test. A first platen supporting an electrical probe. A chuck supporting the device under test. A second platen supporting an optical probe. The first platen and the second platen positioned above the device under test. A percentage of the top surface of the second platen terminating into free space.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.