Gas sensor with attenuated drift characteristic
US7370511B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 8, 2004 |
| Grant date | May 13, 2008 |
| Priority date | — |
| Expiry date | Nov 14, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N27/128
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A sensor with an attenuated drift characteristic, including a layer structure in which a sensing layer has a layer of diffusional barrier material on at least one of its faces. The sensor may for example be constituted as a hydrogen gas sensor including a palladium/yttrium layer structure formed on a micro-hotplate base, with a chromium barrier layer between the yttrium layer and the micro-hotplate, and with a tantalum barrier layer between the yttrium layer and an overlying palladium protective layer. The gas sensor is useful for detection of a target gas in environments susceptible to generation or incursion of such gas, and achieves substantial (e.g., >90%) reduction of signal drift from the gas sensor in extended operation, relative to a corresponding gas sensor lacking the diffusional barrier structure of the invention.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.