Complex microdevices and apparatus and methods for fabricating such devices
US7372616B2 · kind B2 · utility
15Cited by
31References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 27, 2005 |
| Grant date | May 13, 2008 |
| Priority date | — |
| Expiry date | Jan 24, 2026 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC25D1/003
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Various embodiments of the invention are directed to various microdevices including sensors, actuators, valves, scanning mirrors, accelerometers, switches, and the like. In some embodiments the devices are formed via electrochemical fabrication (EFAB™).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.