In situ optical surface temperature measuring techniques and devices
US7374335B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 24, 2006 |
| Grant date | May 20, 2008 |
| Priority date | — |
| Expiry date | Feb 24, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J5/048
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A luminescent temperature sensor comprising (i) an object having a recess, (ii) a layer of luminescent material disposed in the recess, wherein the luminescent material emits electromagnetic radiation having a detectable optical characteristic that is functionally dependent on the temperature of the object, and (iii) a light waveguide in optical communication with the layer of luminescent material, is provided. A test device for measuring a temperature in a processing step comprising (i) an object having a surface and having a recess in the surface of the object, (ii) a layer of luminescent material disposed in the recess, wherein the luminescent material emits electromagnetic radiation having a detectable optical characteristic that is functionally dependent on the temperature of the object in response to a source of excitation radiation, and (iii) an optical window that seals said layer of luminescent material in the recess in the surface of the object, is provided.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.