Patent assignee · US · COMPANY

Luxtron Corporation

65Patents
0Active
65Granted
40Portfolio score

Filing activity: Feb 15, 1978 → Feb 24, 2006

Most-cited patents

PatentTitleAreaCited byStatus
US4986671A Three-parameter optical fiber sensor and system Physics 492 Expired
US6010538A In situ technique for monitoring and controlling a process of chemical-mechanical-polishing via a radiative communication link Physics 127 Expired
US4448547A Optical temperature measurement technique utilizing phosphors Physics 120 Expired
US4560286A Optical temperature measurement techniques utilizing phosphors Physics 101 Expired
US4752141A Fiberoptic sensing of temperature and/or other physical parameters Physics 99 Expired
US5304809A Luminescent decay time measurements by use of a CCD camera Physics 99 Expired
US5499733A Optical techniques of measuring endpoint during the processing of material layers in an optically hostile environment Electricity 91 Expired
US4652143A Optical temperature measurement techniques Physics 87 Expired
US4215275A Optical temperature measurement technique utilizing phosphors Physics 85 Expired
US5154512A Non-contact techniques for measuring temperature or radiation-heated objects Physics 84 Expired
US5695660A Optical techniques of measuring endpoint during the processing of material layers in an optically hostile environment Electricity 80 Expired
US5166080A Techniques for measuring the thickness of a film formed on a substrate Physics 67 Expired
US5183338A Temperature measurement with combined photo-luminescent and black body sensing techniques Physics 64 Expired
US5107445A Modular luminescence-based measuring system using fast digital signal processing Physics 64 Expired
US5490728A Non-contact optical techniques for measuring surface conditions Physics 63 Expired
US5308447A Endpoint and uniformity determinations in material layer processing through monitoring multiple surface regions across the layer Electricity 53 Expired
US4621929A Fiber optic thermal anemometer Physics 52 Expired
US5364186A Apparatus and method for monitoring a temperature using a thermally fused composite ceramic blackbody temperature probe Physics 48 Expired
US4897541A Sensors for detecting electromagnetic parameters utilizing resonating elements Physics 44 Expired
US5310260A Non-contact optical techniques for measuring surface conditions Physics 43 Expired
US4789992A Optical temperature measurement techniques Physics 43 Expired
US5717608A Electro-optical board assembly for measuring the temperature of an object surface from infra-red emissions thereof, including an automatic gain control therefore Physics 40 Expired
US4988212A Fiberoptic sensing of temperature and/or other physical parameters Physics 39 Expired
US5769540A Non-contact optical techniques for measuring surface conditions Physics 39 Expired
US4859079A Optical system using a luminescent material sensor for measuring very high temperatures Physics 38 Expired

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.